半导体级晶体生长炉KX260MCZ


Typical Ingot Diameter 单晶直径
200-400 mm (8-16 in)
Pull Chamber Door Opening 副室门尺寸
508 x 2,362 mm (20 x 93 in)
Throat Diameter 喉口直径
457 mm (18 in)
Seed Lift Rate 晶升速率
0-508 mm/hr
Seed Jog Speed (Nominal) 籽晶快速提升速率(最大)
508 mm/min
Total Crucible Travel 坩锅最大行程
280 mm (19.6 in )
Crucible Lift Rate 坩锅提升速率
0-254 mm/hr
Crucible Jog Speed (Nominal) 坩锅快速提升速率(最大)
50.8 mm/min
Seed Rotation (Reversible) 籽晶旋转速率(可逆)
0-35 rpm
Crucible Rotation (Reversible) 坩锅旋转速率(可逆)
0-20 rpm
CUPS 主真空泵
14,200 l/min (300 cfm)
(Min. recommended) Aux 辅真空泵
1,700 l/min (50 cfm)
*Hot Zones available to fit following crucible sizes 热场尺寸取决于坩锅直径
**Charges can be enhanced with Xtramelt? Feeder 使用 Xtramelt? 二次加料系统可提高装料量
**Charges can be enhanced with Xtramelt? Feeder 使用 Xtramelt? 二次加料系统可提高装料量
Crucible Diameter*
坩埚直径
坩埚直径
Crucible Height*
坩埚高度
坩埚高度
Charge Size Cold Pack
冷装投料量
冷装投料量
Enhanced Charge**
复投装料量
复投装料量
28.0 in
17.0 in
240 kg
300 kg
24.0 in
16.33 in
150 kg
180 kg